Ferroelectric capacitor, process for production thereof and...

Details Ferroelectric capacitor, process for production thereof and... Ferroelectric capacitor, process for production thereof and...

2007-07-24

2007-07-24

Coleman, William David (Department: 2823)

Semiconductor device manufacturing: process

Having magnetic or ferroelectric component

C257SE21664

Reexamination Certificate

active

11024873

ABSTRACT:
A ferroelectric capacitor includes a pair of electrodes, and at least one ferroelectric held between the pair of electrodes, in which the ferroelectric includes a first ferroelectric layer having a surface roughness (RMS) determined with an atomic force microscope of 10 nm or more; and a second ferroelectric layer being arranged adjacent to the first ferroelectric layer and having an RMS of 5 nm or less. A process produces such a ferroelectric capacitor by forming a first ferroelectric layer on or above one of a pair of electrodes at a temperature equal to or higher than a crystallization temperature at which the first ferroelectric layer takes on a ferroelectric crystalline structure, and forming a second ferroelectric layer on the first ferroelectric layer at a temperature lower than a crystallization temperature at which the second ferroelectric layer takes on a ferroelectric crystalline structure.

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