Electricity: electrical systems and devices – Electrostatic capacitors – Fixed capacitor
Patent
1999-02-23
2000-06-06
Kincaid, Kristine
Electricity: electrical systems and devices
Electrostatic capacitors
Fixed capacitor
361305, 361313, 3613215, H01G 4008, H01G 4006
Patent
active
06072689&
ABSTRACT:
An integrated circuit capacitor in which a first conductive plate, a layer of ferroelectric material, and a second conductive plate are deposited and formed in sequence. Thereafter a diffusion barrier material and an insulative material are deposited either as a layered dielectric stack with alternating layers of the diffusion barrier material and the insulative material with tensile and compressive stresses in the alternating layers offsetting one another, or as a graded diffusion barrier material varying from a binary oxide of Ta, Nb, or Zr at the surface of the ferroelectric material to SiO.sub.2 at a distance above the surface of the ferroelectric material.
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Advanced Technology & Materials Inc.
Hultquist Steven J.
Kincaid Kristine
Thomas Eric W.
Zitzmann Oliver A.
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