Ferroelectric capacitor and a method for manufacturing thereof

Details Ferroelectric capacitor and a method for manufacturing thereof Ferroelectric capacitor and a method for manufacturing thereof

2006-07-11

2006-07-11

Ha, Nguyen T. (Department: 2831)

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

C361S311000, C361S313000, C361S306100, C361S306300, C361S321100, C257S294000, C257S295000

Reexamination Certificate

active

07075773

ABSTRACT:
It is an object of the present invention to provide a ferroelectric capacitor which maintains high ferroelectricity. A silicon oxide layer2, a lower electrode12, a ferroelectric layer8and an upper electrode10are formed on a silicon substrate2. The lower electrode12is formed by an alloy layer made of iridium and platinum. The alloy layer of the lower electrode12can be formed under appropriate lattice constant correspond with a kind and composition of the ferroelectric layer8. So that, a ferroelectric layer having excellent ferroelectricity can be obtained. Also, it is possible to prevent vacancy of oxygen in the ferroelectric layer8.

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