Feedforward, feedback wafer to wafer control method for an...

Details Feedforward, feedback wafer to wafer control method for an... Feedforward, feedback wafer to wafer control method for an...

2007-01-02

2007-01-02

Gandhi, Jayprakash N. (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S031000

Reexamination Certificate

active

10609129

ABSTRACT:
A method of using a run-to-run (R2R) controller to provide wafer-to-wafer (W2W) control in a semiconductor processing system is provided. The R2R controller includes a feed-forward (FF) controller, a process model controller, a feedback (FB) controller, and a process controller. The R2R controller uses feed-forward data, modeling data, feedback data, and process data to update a process recipe on a wafer-to-wafer time frame.

REFERENCES:
patent: 6587744 (2003-07-01), Stoddard et al.
patent: 6728591 (2004-04-01), Hussey et al.
patent: 6748280 (2004-06-01), Zou et al.
patent: 6999848 (2006-02-01), Helwig
patent: 2003/0014145 (2003-01-01), Reiss et al.
patent: WO 00/79355 (2000-12-01), None
patent: WO 03/026001 (2003-03-01), None

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