Feedback-controlled workpiece positioning system

Details Feedback-controlled workpiece positioning system Feedback-controlled workpiece positioning system

1982-09-29

1986-08-05

Roskoski, Bernard

Electricity: motive power systems

Positional servo systems

With particular 'error-detecting' means

364582, 250201, 318480, 318577, G05B 106

Patent

active

046045627

ABSTRACT:
X-Y position measurement apparatus is employed with feedback controlled X-Y positioning apparatus for positioning a workpiece stage at a desired X-Y coordinate position in response to signals indicative of the actual position and the desired position of the workpiece stage. A normalization circuit is employed for gain correction of the signals indicative of the actual position of the workpiece stage.

REFERENCES:
patent: 3718821 (1973-02-01), Vischulis
patent: 3798524 (1974-03-01), Okamoto
patent: 3886562 (1975-05-01), Atzinger
patent: 3909688 (1975-09-01), Blaschke
patent: 4123695 (1978-10-01), Hale
patent: 4160200 (1979-07-01), Imamura
patent: 4203064 (1980-05-01), Suziki
patent: 4425537 (1981-01-01), Phillips
patent: 4429267 (1984-01-01), Veale
patent: 4442388 (1984-04-01), Phillips
patent: 4458145 (1984-07-01), Voles
patent: 4496832 (1985-01-01), Sakai

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