Feedback-controlled piezoelectric force measuring apparatus

Measuring and testing – Dynamometers – Responsive to force

Reexamination Certificate

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Reexamination Certificate

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07434482

ABSTRACT:
A feedback-controlled force measuring apparatus with a force input element, a piezoelectric force generating element and a precision motion detection element in a feedback-controlled loop. Two embodiments are described. In one the force-generating element is a supported proof mass to sense linear acceleration, and in the other the force-generating element is a diaphragm supported to sense external pressure. The precision motion detection element employs resistance and inductance of a case-fixed coil of wire modulated by the distance from the coil to an electrically-conductive member connected to a force-generating element. The piezoelectric force generating element may be either a bimorph, or a piezoelectric stack.

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patent: 7367242 (2008-05-01), Xi et al.
patent: 2005/0151445 (2005-07-01), Titschert et al.
patent: 2007/0146334 (2007-06-01), Inokawa

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