Feedback controlled gas mixture generator especially for an hygr

Details Feedback controlled gas mixture generator especially for an hygr Feedback controlled gas mixture generator especially for an hygr

1991-01-22

1993-04-06

Wayner, William E.

Measuring and testing

Instrument proving or calibrating

Volume of flow, speed of flow, volume rate of flow, or mass...

73 2901, 236 44A, G01C 1738, B01F 302

Patent

active

051992957

ABSTRACT:
A small moisture addition apparatus which regularly, through use of a counterflow, adds a controlled amount of moisture to a sample gas analyzed by an hygrometer to reduce the response time of the hygrometer and to provide automatic verification that the hygrometer is functioning. A method of using that apparatus is also disclosed. The apparatus and method of the present invention can be applied to gas components other than moisture and to the detectors of such components.

REFERENCES:
patent: 3614855 (1971-10-01), Van Luik, Jr.
patent: 4356834 (1982-11-01), LeMay
patent: 4625543 (1986-12-01), Ertl et al.
Diffusion Cell, Analytical Chemistry, vol. 46 Aug. 1975 pp. 1705-1707.
K. Sugiyama & T. Ohmi, "Ultraclean Gas Delivery Systems--Part I", in Microcontamination at 49-54 (Nov. 1988).
T. Kimura, J. Mettes & M. Schack, "Sub-ppb Analysis of Nitrogen Gas by APIMS":, presented at Technical Symposium of SEMICON EAST 89 in Boston, Mass. (Sep. 1989).

Affiliated with

Also associated with

Rating

Feedback controlled gas mixture generator especially for an hygr does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Feedback controlled gas mixture generator especially for an hygr, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Feedback controlled gas mixture generator especially for an hygr will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-528498