Feed through for application of HF energy

Details Feed through for application of HF energy Feed through for application of HF energy

1989-11-06

1991-11-12

Niebling, John

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

20429808, 20429815, 20429834, 118723, 118730, 156345, C23C 1400, C23F 102

Patent

active

050645226

ABSTRACT:
To supply high-frequency energy to a workpiece support (5) which rotates in a vacuum chamber (3), a cylindrical electrode (19) is coaxially provided on a bearing shaft (7) and the energy is coupled in capacitively, via the rotary capacitor formed by the electrode (19) and the shaft (7).

REFERENCES:
patent: 2555154 (1951-05-01), Raymond
patent: 2572970 (1989-10-01), Baker et al.
patent: 2602118 (1952-07-01), Adams et al.
patent: 3013225 (1961-12-01), Ouchi
patent: 4170541 (1979-10-01), Lamont
patent: 4269137 (1981-05-01), Johnson
patent: 4526644 (1985-07-01), Fujiyama et al.
patent: 4557819 (1985-12-01), Meacham et al.
patent: 4704301 (1987-11-01), Bauer et al.
patent: 4714594 (1987-12-01), Mircea

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