Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Using radiant energy
Patent
1995-07-07
1998-05-05
Brown, Glenn W.
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Using radiant energy
324537, 324752, G01R 31308
Patent
active
057479992
ABSTRACT:
A non-contact voltage feeding apparatus for inspecting a circuit pattern on a substrate. The feeding apparatus includes a feed control element having a laminated structure as a light probe. A voltage is applied to the light probe disposed on the feeding side of the circuit pattern to be inspected by irradiating the light probe with a laser beam. An electrostatic capacitance coupling under a non-contact system is provided on the detection side, and an electrical condition of the coupling is extracted from the circuit and a waveform processing is performed on the detected signals so as to make it possible to test respective conductive paths of the circuit pattern.
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Brown Glenn W.
Okano Hitech Co., Ltd.
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