Feature targeted inspection

Details Feature targeted inspection Feature targeted inspection

2005-08-16

2005-08-16

Picard, Leo (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S121000

Reexamination Certificate

active

06931297

ABSTRACT:
A method of inspecting a subject integrated circuit. A set of historical integrated circuits is inspected to detect defects and produce historical data. Features of the historical integrated circuits that have an occurrence of defects that is greater than a given limit are designated as high risk features, based on the historical data. Locations of the high risk features are identified on the subject integrated circuit. The locations of the high risk features are input into an inspection tool, and the locations of the high risk features on the integrated circuit are inspected to at least one of detect defects and measure critical dimensions, and produce subject data.

REFERENCES:
patent: 6687561 (2004-02-01), Pasadyn et al.
patent: 6745086 (2004-06-01), Bode et al.
patent: 6754593 (2004-06-01), Grover et al.
patent: 2004/0088068 (2004-05-01), Kadosh

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