Metal working – Method of mechanical manufacture – Electrical device making
Reexamination Certificate
2005-04-12
2005-04-12
Tugbang, A. Dexter (Department: 3729)
Metal working
Method of mechanical manufacture
Electrical device making
C029S603150, C205S211000, C216S039000, C360S125330, C360S317000
Reexamination Certificate
active
06877213
ABSTRACT:
A method for reducing feature size in a thin film magnetic write head includes plating a seed layer over a selected base layer, spinning a photoresist layer onto the seed layer, defining a trench in the photoresist layer, depositing an insulative spacer layer to cover the trench side walls using a low temperature chemical vapor deposition process, anisotropically etching to remove spacer layer material from the bottom of the trench and thereby expose the plating seed layer while leaving intact vertical portions of the spacer layer that cover the trench side walls and narrow its width, forming a structure of reduced feature size by electroplating metallic material into the narrowed trench, stripping away the photoresist layer and the spacer layer vertical portions, and milling or sputter etching the plating seed layer to leave a structure of reduced feature size.
REFERENCES:
patent: 4417393 (1983-11-01), Becker
patent: 4541001 (1985-09-01), Schutten et al.
patent: 4803338 (1989-02-01), Kumasaka et al.
patent: 4871630 (1989-10-01), Giammarco et al.
patent: 5315151 (1994-05-01), Hsieh et al.
patent: 5595941 (1997-01-01), Okamoto et al.
patent: 5658826 (1997-08-01), Chung
patent: 5710066 (1998-01-01), Okamoto et al.
patent: 5719089 (1998-02-01), Cherng et al.
patent: 5802700 (1998-09-01), Chen et al.
patent: 5863707 (1999-01-01), Lin
patent: 5885750 (1999-03-01), Hsiao et al.
patent: 5907775 (1999-05-01), Tseng
patent: 5910871 (1999-06-01), Kawanami et al.
patent: 5928967 (1999-07-01), Radens et al.
patent: 6100014 (2000-08-01), Lin et al.
patent: 6136696 (2000-10-01), Horiba
patent: 6140201 (2000-10-01), Jenq et al.
patent: 6423475 (2002-07-01), Lyons et al.
patent: 6521335 (2003-02-01), Amin et al.
patent: 6540928 (2003-04-01), Kobrin et al.
Duft Walter W.
Nguyen Donghai D.
Tugbang A. Dexter
LandOfFree
Feature size reduction in thin film magnetic head using low... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Feature size reduction in thin film magnetic head using low..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Feature size reduction in thin film magnetic head using low... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3417374