Fault point estimating system using abnormal current and potenti

Details Fault point estimating system using abnormal current and potenti Fault point estimating system using abnormal current and potenti

1996-09-18

1999-08-24

Beausoliel, Jr., Robert W.

Excavating

324751, G01R 3128

Patent

active

059433469

ABSTRACT:
In a semiconductor device, a plurality of functional test patterns are generated and transmitted to the semiconductor device, and it is determined whether or not an abnormal current, flows through the semiconductor device. Also, the semiconductor device is irradiated with electrons, and secondary electrons from the semiconductor device are detected. Potential contrast images are calculated in accordance with the detected secondary electrons in response to the functional test patterns. A logic operation is performed upon the potential contrast images to estimate a fault point.

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