Joints and connections – Structurally installed in diverse art device – Head or base
Reexamination Certificate
2001-03-16
2003-04-15
Browne, Lynne H. (Department: 3679)
Joints and connections
Structurally installed in diverse art device
Head or base
C414S584000, C414S401000
Reexamination Certificate
active
06547473
ABSTRACT:
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a fastening device for a conveying cart, and, in particular, a fastening device for fastening a conveying cart used for conveying semiconductor substrates between processing apparatuses, onto a processing apparatus used as a to-be-fastened apparatus.
Generally, many semiconductor manufacturing apparatuses are set in a semiconductor manufacturing factory, and, semiconductor devices are manufactured in which semiconductor substrates are conveyed between these semiconductor manufacturing apparatuses. The conveyance of semiconductor substrates is performed almost automatically. However, there are cases where it is difficult to perform conveyance of semiconductor substrates automatically due to reasons concerning the equipment of the factory. In such a case, a person performs conveyance of semiconductor substrates manually in a condition in which the semiconductor substrates are mounted on a conveying cart.
Further, when the semiconductor substrates are conveyed into a predetermined position of a semiconductor manufacturing apparatus, the conveying cart is fastened to the semiconductor manufacturing apparatus. Then, the semiconductor substrate mounted on the conveying cart is received by the semiconductor manufacturing apparatus by using an actuator provided on the semiconductor manufacturing apparatus or the conveying cart.
At this time, when the conveying cart is not precisely fastened to the semiconductor manufacturing apparatus which is regarded as a to-be-fastened apparatus, reception of the semiconductor substrate by the semiconductor manufacturing apparatus using the actuator may not be performed properly. Further, when a long time is required for fastening the conveying cart to the semiconductor manufacturing apparatus, an efficiency in manufacturing semiconductor devices is degraded. Accordingly, it is demanded that the conveying cart is fastened to the to-be-fastened apparatus easily and positively.
2. Description of the Related Art
In the related art, there is no specific standard for the fastening device for the conveying cart. Therefore, an original fastening device is used for each semiconductor manufacturing equipment. Japanese Laid-Open Patent Application No. 2000-72226 discloses one example thereof.
The fastening device disclosed in this publication is such that, a plate having a V-shape guiding block, a positioning block, and a pin provided thereon is provided on the side of the to-be-fastened apparatus thereof, and first and second rollers and hook are provided on the side of the conveying cart thereof.
Then, when the conveying cart is fastened to the to-be-fastened apparatus, the first roller is positioned and is caused to engage with the V-shaped guiding block, the conveying cart is rotated toward the to-be-fastened apparatus around the position at which the first roller and V-shape guiding block are engaged, and the hook is caused to engage with the pin.
In this state, the second roller is caused to engage with the positioning block, and the first roller is pressed toward the V-shape guiding block. Thereby, the conveying cart is fastened to the to-be-fastened apparatus.
However, in the above-described configuration, the plate having such a complicated configuration as having the V-shape guiding block, positioning block and pin provided thereto is provided on the side of the to-be-fastened apparatus. Accordingly, the configuration of the fastening device is complicated.
Further, in the above-described fastening device, the first roller should be positioned to the V-shape guiding block, and, then, the first roller should be caused to engage with the V-shape guiding block. Normally, the first roller is provided on the bottom surface of the conveying cart, and may not be easily viewed by an operator. Accordingly, it is troublesome for the operator to position and cause the first roller to engage with the V-shape guiding block.
Further, because an original fastening device is applied for each semiconductor manufacturing equipment as mentioned above, the conveying cart and fastening device are not compatible with other manufacturing equipment. Thereby, costs of the equipment increase, and, also, because the conveying cart cannot be used for a plurality of equipment in common, inconvenience occurs.
Further, in a case where an actuator or the like which is driven by electric power is provided on the conveying cart, it is necessary to provide, in addition to the fastening device, a power supply unit for supplying power to the actuator from the to-be-fastened apparatus. Thereby, a configuration of the conveying cart and to-be-fastened apparatus at the fastening position are complicated.
Further, at a time of fastening, it is necessary to perform the operation of mechanically fastening the conveying cart to the to-be-fastened apparatus and the operation of electrically connecting the conveying cart to the to-be-fastened apparatus. Thereby, the operation at a time of fastening is totally complicated.
SUMMARY OF THE INVENTION
The present invention has been devised in consideration to these problems, and an object of the present invention is to provide the fastening device for the conveying cart by which the conveying cart can be fastened to the to-be-fastened apparatus easily and positively.
A fastening device for a conveying cart, according to the present invention, used for fastening the conveying cart to a to-be-fastened apparatus, comprising:
a flange provided on a side of the to-be-fastened apparatus of the device, and having a pin standing therefrom, and a recess formed therein; and
a fastening mechanism provided on a side of the conveying cart of the device, and having a first hook member engaging with the pin of the flange so as to position the conveying cart with respect to the to-be-fastened apparatus, and a second hook member engaging with the recess of the flange so as to fasten the conveying cart to the to-be-fastened apparatus.
Thereby, as an operator merely pushes the conveying cart, the first hook member of the fastening mechanism engages with the pin of the flange, and, also, the second hook member of the fastening mechanism engages with the recess of the flange. Thereby, the conveying cart is fastened to the to-be-fastened apparatus. Thus, it is possible to easily and positively fasten the conveying cart to the to-be-fastened apparatus with the simple configuration.
Other objects and further features of the present invention will become more apparent from the following detailed description when read in conjunction with the accompanying drawings.
REFERENCES:
patent: 6033175 (2000-04-01), Pflueger et al.
patent: 6102647 (2000-08-01), Yap
patent: 6238283 (2001-05-01), Matsuyama et al.
patent: 6305500 (2001-10-01), McCrandall et al.
patent: 6371714 (2002-04-01), Sherard et al.
patent: 6494671 (2002-12-01), Takaiti et al.
patent: 7-7005 (1995-02-01), None
patent: 2000-72226 (2000-03-01), None
Adachi Tsukasa
Takayama Yukio
Yasuda Akihiro
Browne Lynne H.
Fujitsu Limited
Thompson Kenneth
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