Metal treatment – Process of modifying or maintaining internal physical... – Chemical-heat removing or burning of metal
Patent
1976-12-16
1979-03-06
Ozaki, G.
Metal treatment
Process of modifying or maintaining internal physical...
Chemical-heat removing or burning of metal
148172, 427 87, H01L 21208
Patent
active
041429249
ABSTRACT:
A uniform and thin layer of a semiconductor is grown on a semiconductor substrate by an improved liquid phase epitaxy growth method. The growth solution is supercooled and is pushed rapidly over the substrate on which the layer of solute is grown. In GaAs the amount of supercooling is typically 3.degree. to 5.degree. C. and a constant thickness ultra-thin layer (about 0.18 microns) is grown on top of a GaAs substrate.
REFERENCES:
patent: 3950195 (1976-04-01), Rode et al.
patent: 3981764 (1976-09-01), Ito et al.
Massachusetts Institute of Technology
Ozaki G.
Santa Martin M.
Smith, Jr. Arthur A.
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