Fast swapping station for wafer transport

Details Fast swapping station for wafer transport Fast swapping station for wafer transport

2007-06-26

2007-06-26

Underwood, Donald (Department: 3652)

Material or article handling

Process

Of charging load-holding or -supporting element from source...

C294S116000, C294S119100, C414S751100, C414S753100, C414S941000, C901S031000, C901S039000

Reexamination Certificate

active

10810361

ABSTRACT:
An apparatus for accepting and transferring at least one disk-like member is provided. The apparatus includes a pick- and place-mechanism including gripping means. In effect, the mechanism is adapted to provide pick- and/or place-cycles, which during operation provides a movement of said gripping means between an up and a down position and vice versa, whereby, in the down position, said gripping means either picks the disk-like member from a load position or places the disk-like member onto the load position.

REFERENCES:
patent: 3401974 (1968-09-01), Martelee
patent: 4451197 (1984-05-01), Lange
patent: 4968077 (1990-11-01), Redmon et al.
patent: 6039375 (2000-03-01), Bauman
patent: 6074163 (2000-06-01), Yamazaki et al.
patent: 6530616 (2003-03-01), McIntosh et al.

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