Optics: measuring and testing – By polarized light examination
Reexamination Certificate
2011-01-18
2011-01-18
Lauchman, L. G (Department: 2877)
Optics: measuring and testing
By polarized light examination
C356S399000, C356S400000
Reexamination Certificate
active
07872751
ABSTRACT:
A sample investigation system (ES) in functional combination with an alignment system (AS), and methodology of enabling very fast, (eg. seconds), sample height, angle-of-incidence and plane-of-incidence adjustments, with application in mapping ellipsometer or the like systems.
REFERENCES:
patent: 3874797 (1975-04-01), Kasai
patent: 3880524 (1975-04-01), Dill et al.
patent: 4647207 (1987-03-01), Bjork et al.
patent: 4672196 (1987-06-01), Canino
patent: 5343293 (1994-08-01), Berger et al.
patent: 5410409 (1995-04-01), Ray
patent: 5412473 (1995-05-01), Rosencwaig et al.
patent: 5581350 (1996-12-01), Chen et al.
patent: 5764365 (1998-06-01), Finarov
patent: 6081334 (2000-06-01), Grimbergen et al.
patent: RE38153 (2003-06-01), Finarov
patent: 6678043 (2004-01-01), Vurens
patent: 7099010 (2006-08-01), Schulz
patent: 7158231 (2007-01-01), Woollam et al.
patent: 7295330 (2007-11-01), Chow
patent: 7327444 (2008-02-01), Naka et al.
patent: RE40225 (2008-04-01), Finarov
patent: 7505133 (2009-03-01), Zawaideh et al.
patent: 7505134 (2009-03-01), Johs et al.
patent: 7746472 (2010-06-01), Johs et al.
Hale Jeffrey S.
He Ping
Liphardt Martin M.
Pfeiffer Galen L.
J.A. Woollam Co. Inc.
Lauchman L. G
Welch James D.
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