Radiant energy – Invisible radiant energy responsive electric signalling – Infrared responsive
Patent
1987-08-04
1988-12-13
Howell, Janice A.
Radiant energy
Invisible radiant energy responsive electric signalling
Infrared responsive
250341, G01J 3433
Patent
active
047912960
ABSTRACT:
A method of measuring the phosphorus concentration in phosphosilicate and borophosphosilicate films using infrared spectroscopy in conjuction with derivative spectroscopic techniques. This method is easily adapted for use with a Fourier Transform spectrometer. A spectrum of the film is taken with a dual beam infrared spectrometer. The second derivative of the spectrum is plotted to rersolve close peaks. Amplitudes of the P.dbd.O band at 1316 cm.sup.-1 and the O--Si--O band at 818 cm.sup.-1 are measured. A ratio between these amplitudes is calculated. The ratio is then matched to a calibration curve to determine the phosphorus concentration.
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Howell Janice A.
Inmos Corporation
Manzo Edward D.
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