Fast atom bombardment source, fast atom beam emission...

Details Fast atom bombardment source, fast atom beam emission... Fast atom bombardment source, fast atom beam emission...

2007-04-26

2009-06-23

Nguyen, Kiet T (Department: 2881)

Radiant energy

Electrically neutral molecular or atomic beam devices and...

Reexamination Certificate

active

07550715

ABSTRACT:
A positive electrode drive unit enables a positive electrode to be repeatedly rotated about the center of the positive electrode to vary a distance between the positive electrode and an atom emission unit. A control unit receives input data which is set to obtain a desired atom density distribution by displacement of the positive electrode, and the control unit outputs a drive control signal for displacing the positive electrode to the positive electrode drive unit. The positive electrode drive unit is stopped during running by the control unit, or a drive speed of the positive electrode drive unit is changed by the control unit. Therefore, a residence time of each attitude is changed in the positive electrode to vary the atom density per unit time.

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European Office Action (in English language) issued in Application No. GB 0707929.6 dated Aug. 31, 2007.

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