Fast atom beam source

Details Fast atom beam source Fast atom beam source

1992-03-03

1993-06-01

Dzierzynski, Paul M.

Radiant energy

Electrically neutral molecular or atomic beam devices and...

H05H 302

Patent

active

052162419

ABSTRACT:
A fast atom beam source is capable of emitting a fast atom beam with low energy efficiently and is compact. A reaction gas mixed with a halogen or a halide is introduced into a fast atom beam source casing through a plate-shaped anode, and gas ions that are produced by a plasma discharge induced at a relatively low discharge voltage are converted into a fast atom beam, which is emitted from fast atom beam emitting holes provided in a plate-shaped cathode that is disposed opposite the anode.

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Gohda, H. et al., "SIMS Analysis of Insulating Materials Using a New Type Electron Neutralizing Gun", Materials for the 54th Study Meeting of the Japan Society for the Promotion of Sciences, No. 604, pp. 46-51 (Dec. 1987).
Shimokawa, F. and Nagai, K. "A Low Energy Fast-Atom Source", Nuclear Instruments and Methods in Physics Research B33, (198) pp. 867-870, as reprinted from Nuclear Instruments and Methods in Physics Research B.
Fusao Shimokawa and Kazutoshi Nagai, "A Low-Energy Fast-Atom Source", Nuclear Instruments & Methods in Physics Research, Section-B, vol. B33, No. 1-4, Jun. 1988, pp. 867-870.

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