Fast atom beam source

Details Fast atom beam source Fast atom beam source

1996-11-14

1998-04-14

Tokar, Michael J.

Radiant energy

Electrically neutral molecular or atomic beam devices and...

H05H 300

Patent

active

057395284

ABSTRACT:
A fast atom beam source which can efficiently provide a fast atom beam having a diameter less than 1 .mu.m. The fast atom beam source has an ion source for ionizing a liquid metal to generate metal ions, a control electrode system for controlling the flux of metal ions, and a neutralizing chamber in which the ion beam is neutralized to generate a fast atom beam. The neutralizing chamber is disposed in a path of the ion flux. A neutralizing gas supply supplies a neutralizing gas into the neutralizing chamber, the neutralizing gas containing a metal element.

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Journal of Vacuum Science and Technology: Part A, A scanned microfocused neutral beam for use in secondry ion mass spectrometry, vol. 4, 1986, figs. 1A-1B.
Patent Abstracts of Japan, vol. 13, No. 097 (E-723), Mar. 7, 1989, abstract of JP 63 271855A (Toshiba Corp) Nov. 9, 1988.
Musashi Institute of Technology et al., "Trail of Focused Atom Beam Source", Extended Abstracts (The 56th Autumn Metting, 1995), The Japan Society of Applied Physics, Japan, 1995, p. 483.
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Kazuyoshi Kagai et al, A Fab-Sims/Sinms Appratus, Nuclear Instruments and Method in Physics Research, Elsevier Science, Publishers B.V, Amsterdam, 1988, pp. 486-488.
Kazuyoshi Nagai et al., "A Focused Fast Atom Beam Bombardment Sims", Japan Society for the Promotion of Society, 1986, pp. 36-40.

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