Radiant energy – Electrically neutral molecular or atomic beam devices and...
Patent
1990-11-20
1991-10-08
Berman, Jack I.
Radiant energy
Electrically neutral molecular or atomic beam devices and...
H05H 302
Patent
active
050556720
ABSTRACT:
A fast atom beam source comprises a evacuated cylinder, an anode set at one end or an intermediate portion of the cylinder, a cathode with fast atom emission orifices on it, and set at the other end of the cylinder, and a DC high voltage power supply for generating gas discharge by applying a high voltage between the anode and the cathode. A slit is provided on inside wall of the cylinder and a reservoir for oil or low-melting point metal is connected to the slit. A heater is set on the resevoir for vapourizing the oil or low-melting point metal. It supplies vapor of oil or low-melting point metal into the cylinder. Many ions of oil or low melting point metal are generated in glow through gas (the oil, vapor or the metal vapor) discharge by high voltage applying. They are accelerated towards the cathode. Then, they are neutralized after collision with the vapor of oil or low-melting point metal remaining near the cathode and are emitted from the orifices on the cathode. They constitute a fast atom beam. During such operation, the vapor of oil or low-melting point metal enters the cylinder through the slit and maintains an equilibrium condition of gas density in the cylinder. Thus, an automatic supply of the gas consumed as a fast atom beam is effected without any gas feeding device or any gas adjusting device.
REFERENCES:
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patent: 4734622 (1988-03-01), Stein
patent: 4789779 (1988-12-01), Drullinger
Nagai, K. and Kuwano, H. "FAB-SIMS Study for Analysis of Insulators", Springer Series in Chemical Physics 36, (Springer-Verlag, 1984) pp. 448-450.
Shimokawa, F. and Nagai, K. "A Low Energy Fast-Atom Source", Nuclear Instruments and Methods in Physics Research B33, (198) pp. 867-870, as reprinted from Nuclear Instruments and Methods in Physics Research B.
Nagai, K., "Mass Analysis for Metal and Plastics by a FAB-SIMS/SNMS Apparatus", Review of the Electrical Communications Laboratories, vol. 36 No. 6, (1988) pp. 587-592.
Berman Jack I.
Ebara Corporation
Nguyen Kiet T.
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