Optics: measuring and testing – Dimension
Reexamination Certificate
2005-11-09
2008-11-11
Lauchman, L. G. (Department: 2877)
Optics: measuring and testing
Dimension
C356S003090, C356S614000, C356S620000, C356S141100
Reexamination Certificate
active
07450251
ABSTRACT:
Systems and techniques for laser metrology. A system may include a laser source and a fanning apparatus configured to generate a fanned laser beam. The fanned laser beam may be scanned across the surface of an object, and may reflect off a plurality of targets positioned on the surface. A position detection module may determine a position of the metrology targets based on the reflected beam.
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Becker Gregory S.
Bender Douglas
Guthrie Richard W.
Liu John Y.
Liu Ketao
Hallman Jonathan W.
Lauchman L. G.
MacPherson Kwok & Chen & Heid LLP
Slomski Rebecca C
The Boeing Company
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