Fan filter unit and a clean room for using the same

Details Fan filter unit and a clean room for using the same Fan filter unit and a clean room for using the same

1997-10-27

2000-03-07

Joyce, Harold

Ventilation

Clean room

553852, 55473, 96132, 96138, 96142, F24F 316

Patent

active

060333014

ABSTRACT:
A fan filter unit is provided for use in filtering air circulating in a clean room. The fan filter unit includes a unit casing; a ventilation fan housed in the unit casing; a dust removal filter in the bottom of the unit casing; and one or more gas absorption filters for removing gases from the circulating air. The one or more gas absorption filters are located in the unit casing such that the ventilation fan can be inspected without removing the one or more gas absorption filters and an inspector can walk on an upper face of the unit casing. In one preferred embodiment, the one or more gas absorption filters are located above the dust removal filter and below the ventilation fan. In a second preferred embodiment, a fan filter unit is provided that includes a plurality of fan filter subunits, each fan filter subunit comprising a unit casing, a ventilation fan housed in the unit casing, and a dust removal filter in the bottom of the unit casing. The fan filter unit also includes a chamber enclosing the intake sides of the plurality of fan filter subunits, the chamber containing one or more air intake openings in the sides of the chamber. The fan filter unit also includes one or more gas absorption filters for removing gases from the air disposed in the one or more air intake openings of the chamber.

REFERENCES:
patent: 5053065 (1991-10-01), Garay et al.
patent: 5496389 (1996-03-01), Wilcox
patent: 5772738 (1998-06-01), Muraoka

Affiliated with

Also associated with

Rating

Fan filter unit and a clean room for using the same does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Fan filter unit and a clean room for using the same, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Fan filter unit and a clean room for using the same will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-357865