Chemistry: electrical and wave energy – Processes and products – Processes of treating materials by wave energy
Patent
1981-11-06
1983-11-08
Bleutge, John C.
Chemistry: electrical and wave energy
Processes and products
Processes of treating materials by wave energy
20415914, 430270, 430280, 430910, 430914, C08F 250
Patent
active
044140819
ABSTRACT:
A family of negative resins, capable of undergoing crosslinking under the effect of more or less energetic photons (gamma radiation, X-rays, ultraviolet or visible light), applicable to the protection of objects against atmospheric agents and to the production of masks of the type used in the production of integrated circuits. The typical compound according to the invention contains at least one substance of which the chemical formula comprises a thiirane ring: ##STR1## such as 2,3-epithiopropyl methacrylate copolymerized with a vinyl monomer, such as methyl methacrylate. Crosslinking is facilitated by photoinitiators, such as aryl diazonium and aryl iodonium salts liberating Lewis acids. By selecting the photoinitiator, it is possible to act on the spectral region where irradiation is effective.
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Barre Francoise
Dubois Jean-Claude
Eranian Armand
Gazard Maryse
Bleutge John C.
Koeckert A. H.
Thomson - CSF
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