Facility installation structure in clean room

Details Facility installation structure in clean room Facility installation structure in clean room

1996-07-29

1997-09-23

Joyce, Harold

Ventilation

Clean room

553852, F24F 7007

Patent

active

056698143

ABSTRACT:
A floor surface located directly under a facility is provided with an open space. A shut out member is formed to surround the open space. The shut out member extends from the bottom part of the facility to the floor surface. Connection members are placed in a space nearly completely closed by the shut out member and the bottom surface of the facility for connecting the facility with the main power system.

REFERENCES:
patent: 5431599 (1995-07-01), Genco

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