Facility for grinding silicon nitride ceramic workpiece

Details Facility for grinding silicon nitride ceramic workpiece Facility for grinding silicon nitride ceramic workpiece

1995-04-18

1997-02-25

Rose, Robert A.

Abrading

Abrading process

Glass or stone abrading

451287, B24B 722

Patent

active

056054947

ABSTRACT:
An industrially feasible method of grinding silicon nitride ceramics is disclosed and provides a sufficiently smooth surface. Namely, the surface has a maximum height-roughness Rmax of 0.1 microns or less and a ten-point mean roughness Rz of 0.05 micron. Further, with this method, surface damage can be repaired while grinding. The vertical cutting feed rate of a grinding wheel into a workpiece should be within the range of 0.005-0.1 micron for each rotation of the working surface of the wheel and change linearly or stepwise. The cutting speed of the grinding wheel in a horizontal (rotational) direction should be within the range of 25 to 75 m/sec. With this arrangement, the contact pressure and grinding heat that is generated between the workpiece and the hard abrasive grains during grinding are combined. In other words, mechanical and thermal actions are combined.

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Yoshikawa (FC report, vol. 8, No. 5, pp. 148-155, 1990), Japan.
Yogyo Kyokai Shi, "Room Temperature Strength of .beta.-Sialon Fabricated . . . ", vol. 94, first issue, pp. 189-192, 1986 (Kishi et al.), Japan.
Yogyo Kyokai Shi, "Effect of Heat Treatment on Strength of .beta.-Sialon", vol. 95, sixth issue, pp. 630-637, 1987 (Kishi et al.), Japan.
Yogyo Kyokai Shi, "Mirror Finish Grinding of .beta.-Sialon with Fine Grained Diamond Wheels", vol. 94, first issue, pp. 204-210, 1986 (Ichida et al.), Japan.
"High Temperature Deformation and Fracture . . . " (Ikuhara et al.), p. 461, (No date), Japan.
Japanese Industrial Standard, "Definition and Designation of Surface Roughness", 1982, Japan.
Data Base Inspec, Institute of Electrical Engineers, Stevenage, GB, Inspec No. 3264725, Feb. 1988, Sakai S `mirror Finish of silicon nitride ceramics by grinding process` *abstract* & Reports of the Government Industrial Research Institute, vol. 37, No. 1-2, Feb. 1988, Nagoya.

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