Electrical resistors – Strain gauge type – Fluid- or gas pressure-actuated
Patent
1988-04-11
1989-11-14
Shaw, Clifford C.
Electrical resistors
Strain gauge type
Fluid- or gas pressure-actuated
338 42, G01L 122
Patent
active
048810568
ABSTRACT:
A facedown-type semiconductor pressure sensor has a Si sensing element including a diaphragm, a spacer, and a piezoresistive device embedded in the diaphragm, and a pedestal. The spacer, which is positioned between the semiconductor substrate and the pedestal, has a photolitho-graphically etched hole such that the sensing element, the hole and the pedestal define a sealed chamber. The sealed pressure chamber is substantially aligned with the diaphragm.
REFERENCES:
patent: 4068206 (1978-01-01), Popp
Fukazawa Takeshi
Kawasaki Eishi
Miyajima Takeshi
Mizukoshi Masahito
Lateet M. M.
Nippondenso Co. Ltd.
Shaw Clifford C.
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