Face-shear mode quartz crystal vibrators and method of manufactu

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

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310312, 310366, 310348, 310352, 310354, 310346, 310368, H01L 4108

Patent

active

044182996

ABSTRACT:
A miniaturized face-shear mode quartz crystal vibrator and method of manufacture is provided. The vibrator is formed from a Y-cut quartz crystal plate less than 500 .mu.m thick which has been rotated between 45.degree. to 55.degree. about the X-axis. A plurality of vibrators are formed by depositing a thin metallic film on the two opposed planar surfaces of the plate, selectively etching portions of the metallic films and dissolving the uncoated portions of the plate. The metallic films become the vibrator electrode.

REFERENCES:
patent: 2277245 (1942-03-01), Mason
patent: 2743144 (1956-04-01), Bottom et al.
patent: 3072806 (1963-01-01), Sogn
patent: 4035674 (1977-07-01), Oguchi et al.
patent: 4050126 (1977-09-01), Ikeno et al.
patent: 4071797 (1978-01-01), Zumsteg et al.
patent: 4099078 (1978-07-01), Shibata et al.
Handbook of Piezoelectric Crystals, by Buchanan, WADC Technical Report, 54-248, Dec. 1954, pp. 44, 45.
Quartz Crystal Plate, Designated the GT, which Produces a Very Constant Frequency Over a Wide Temperature Range, by Mason, Proceedings of the IRE, May 1940, pp. 220-223.

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