Fabry-Perot piezoelectric tunable filter

Details Fabry-Perot piezoelectric tunable filter Fabry-Perot piezoelectric tunable filter

2011-03-22

2011-03-22

Lee, Hwa S. A (Department: 2886)

Optics: measuring and testing

By light interference

Using fiber or waveguide interferometer

C356S519000, C356S454000

Reexamination Certificate

active

07911623

ABSTRACT:
Disclosed is a microelectromechanically tunable Fabry-Perot device and method of manufacturing tunable Fabry-Perot device and method of manufacturing. The F-P device comprises a first and second substrate which has partially reflective planar surfaces, and the partially reflective planar surfaces are separated by a predetermined separation distance and aligned to provide a F-P cavity, where one or more piezoelectric members are adapted to displace the first and second substrates when an electric field is applied.

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