Radiant energy – Invisible radiant energy responsive electric signalling – Infrared responsive
Patent
1994-12-30
1996-08-27
Fields, Carolyn E.
Radiant energy
Invisible radiant energy responsive electric signalling
Infrared responsive
25033901, 25033902, 356352, G01B 902, G01J 345
Patent
active
055503730
ABSTRACT:
A monolithically constructed infrared, tunable Fabry-Perot cavity filter-detector for spectroscopic detection of particular substances having an absorption line in the wavelength range from 2 to 12 microns. The filter-detector has a hermetically sealed Fabry-Perot cavity that has a mirror which has an adjustable distance relative to another mirror of the cavity. The former mirror is adjusted by piezoelectric film on the mirror support or with piezoelectric stacks or wall supporting the mirror. There may be electrodes situated near the mirrors for capacitive sensing of the distance between the mirrors. Light to be filtered and detected comes in through a window wafer which may have diffractive or refractive microlenses, plus an optional spatial filter. After passing through the window wafer, the light is filtered by the tunable mirrors of the Fabry-Perot cavity. The portion of the light that is passed by the cavity is detected by an infrared microbolometer or a CCD array. The cavity and detector are hermetically sealed in a vacuum.
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Tuna et al., "Control of Mirror Position in a High Precision Interferometer", J. Phys. E. (6B), vol. 6, No. 2, Feb. 1973, pp. 169-170.
J. Jerman et al., "Minature Fabry-Perot Interferometers Micromachined in Silicon for use in Optical Fiber WDM Systems", 1991, pp. 372-375 from IEEE print 91CH2817-5/91/0000-0372.
Cole Barrett E.
Fritz Bernard S.
Horning Robert D.
Fields Carolyn E.
Glick Edward J.
Honeywell Inc.
Shudy Jr. John G.
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