Fabry-Perot interferometer including membrane supported...

Details Fabry-Perot interferometer including membrane supported... Fabry-Perot interferometer including membrane supported...

2005-10-25

2005-10-25

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By light interference

Having partially reflecting plates in series

Reexamination Certificate

active

06958818

ABSTRACT:
An interferometer comprises a membrane, a substrate, and a support structure. The membrane comprises a first reflector. The substrate comprises a second reflector. The support structure circumferentially couples the membrane to the substrate and orients the first reflector parallel to and facing the second reflector.

REFERENCES:
patent: 5739945 (1998-04-01), Tayebati
patent: 6295130 (2001-09-01), Sun et al.
patent: 6307691 (2001-10-01), Goossen
patent: 6590710 (2003-07-01), Hara et al.

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