Fabry-Perot interferometer

Details Fabry-Perot interferometer Fabry-Perot interferometer

2006-06-13

2006-06-13

Boutsikaris, Leonidas (Department: 2872)

Optical: systems and elements

Light interference

Electrically or mechanically variable

C359S260000, C359S578000, C356S454000, C356S506000, C356S519000

Reexamination Certificate

active

07061681

ABSTRACT:
A method of tuning a resonant cavity of an FP (Fabry-Perot) interferometer in a DLD (diffractive light device) MEMS (microelectromechanical system) device, wherein the FP interferometer has a top plate and a bottom plate, and wherein the method comprises; using first and second electromechanical transducers to independently change a distance between the top and bottom plates of the FP interferometer.

REFERENCES:
patent: 5452121 (1995-09-01), Hilgeman
patent: 6400738 (2002-06-01), Tucker et al.
patent: 6608685 (2003-08-01), Wood et al.
patent: 2001/0028503 (2001-10-01), Flanders et al.
patent: 2005/0078906 (2005-04-01), Lunt et al.

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