Fabrication system and fabrication method

Details Fabrication system and fabrication method Fabrication system and fabrication method

2007-12-18

2007-12-18

Picard, Leo (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S121000

Reexamination Certificate

active

11320778

ABSTRACT:
A fabricating method for a system including a plurality of processing apparatuses connected to each other by an inter-apparatus transporter. The semiconductor waters are processed in the processing apparatuses and are transported to specified processing apparatuses in different time interval that are set to N times a unit time interval. Since the fabricating system includes processing apparatuses and an inter-apparatus transporter that are periodically controlled at time intervals related to a unit time, intervals related to a unit time, the scheduling of a plurality of works can be made efficiently to enhance the level of optimization, thus improving the productivity.

REFERENCES:
patent: 3812947 (1974-05-01), Nygaard
patent: 4510673 (1985-04-01), Shils et al.
patent: 4592306 (1986-06-01), Galleco
patent: 4669047 (1987-05-01), Chucta
patent: 4796194 (1989-01-01), Atherton
patent: 4886592 (1989-12-01), Anderle
patent: 5019233 (1991-05-01), Blake
patent: 5024570 (1991-06-01), Kiriseko
patent: 5067218 (1991-11-01), Williams
patent: 5076205 (1991-12-01), Vowles
patent: 5100276 (1992-03-01), Iwasaki et al.
patent: 5135608 (1992-08-01), Okutani
patent: 5202716 (1993-04-01), Tateyama
patent: 5237508 (1993-08-01), Furukawa et al.
patent: 5259881 (1993-11-01), Edwards
patent: 5388945 (1995-02-01), Garric
patent: 5399531 (1995-03-01), Wu
patent: 5404894 (1995-04-01), Shiraiwa
patent: 5436848 (1995-07-01), Nishida et al.
patent: 5442561 (1995-08-01), Yoshizawa et al.
patent: 5443346 (1995-08-01), Murata
patent: 5445491 (1995-08-01), Nakagawa
patent: 5536128 (1996-07-01), Shimoyashiro et al.
patent: 5601686 (1997-02-01), Kawamura et al.
patent: 5820679 (1998-10-01), Yokoyama et al.
patent: 5858863 (1999-01-01), Yokoyama et al.
patent: 6099598 (2000-08-01), Yokoyama et al.
patent: 7062344 (2006-06-01), Yokoyama et al.
patent: 502412 (1992-11-01), None
patent: 57-157518 (1982-09-01), None
patent: 58-50728 (1983-03-01), None
patent: 60-10641 (1985-01-01), None
patent: 61-128512 (1986-06-01), None
patent: 63-244730 (1988-10-01), None
patent: 63-288009 (1988-11-01), None
patent: 64-6540 (1989-02-01), None
patent: 2-292810 (1990-12-01), None
patent: 4115513 (1992-04-01), None
patent: 4-130618 (1992-05-01), None
patent: 4-199709 (1992-07-01), None
patent: 7-122622 (1995-05-01), None
“Operation of LSI Production System to Reduce Development Investment and to Meet Diversified Needs,” Nikkei Microdevice, Aug. 1992, pp. 66-74.
Wolf and Tauber, Silicon Processing for the VLSI Era, vol. 1, 1986, p. 429.
Mamoru Shibada, Cassette Transfer System “Auto Track”, Electrical Material, Mar. 1984, (pp. 4, 14-15, 17).
IBM Technical Disclosure Bulletin vol. 33 Issue 1A pp. 80-84, Jun. 1, 1990, “Knowledge-Based Dynamic Scheduler in Distributed Computer Control.”

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