Fabrication process of Ni-Mn spin valve sensor

Details Fabrication process of Ni-Mn spin valve sensor Fabrication process of Ni-Mn spin valve sensor

1997-10-10

1999-11-30

Kastler, Scott

Metal treatment

Process of modifying or maintaining internal physical...

Magnetic materials

2960308, 360113, C21D 104

Patent

active

059935669

ABSTRACT:
A spin valve (SV) sensor having a Ni--Mn antiferromagnetic (AFM) layer, a pinned layer, a free layer and a spacer layer disposed between said free and pinned layers. The pinned layer is formed over and in contact with the antiferromagnetic (AFM) Ni--Mn layer where the combination of the AFM and pinned layers is first annealed before depositing the rest of the SV layers. Carrying out the annealing process of the combination of the AFM and pinned layers prior to deposition of the rest of the SV layers provides the exchange coupling field necessary to pin the pinned layer while avoiding thermal degradation of the SV sensor giant magnetoresistive effect.

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"Exchange-Coupled Ni-Fe/Fe-Mn, Ni-Mn and NiO/Ni-Fe Films for Stabilization of Magnetoresistive Sensors", T. Lin, et al., IEEE Trans. on Mags., vol. 31, No. 6, Nov. 1995, pp. 2585-2590.
"Improved Exchange Coupling Between Ferromagnetic Ni-Fe and Antiferrogmanetic Ni-Mn-Based Films", T. Lin et al., App.Phys.Lett 65 (9), Aug. 29, 1994, pp. 1183-1185.

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