Electric lamp or space discharge component or device manufacturi – Process – With assembly or disassembly
Patent
1997-12-15
2000-01-25
Patel, Nimeshkumar D.
Electric lamp or space discharge component or device manufacturi
Process
With assembly or disassembly
445 50, H01J 900
Patent
active
060172576
ABSTRACT:
A self-gettering electron field emitter has a first portion formed of a low-work-function material for emitting electrons, and it has an integral second portion that acts both as a low-resistance electrical conductor and as a gettering surface. The self-gettering emitter is formed by disposing a thin film of the low-work-function material parallel to a substrate and by disposing a thin film of the low-resistance gettering material parallel to the substrate and in contact with the thin film of the low-work-function material. The self-gettering emitter is particularly suitable for use in lateral field emission devices. The preferred emitter structure has a tapered edge, with a salient portion of the low-work-function material extending a small distance beyond an edge of the gettering and low resistance material. A fabrication process specially adapted for in situ formation of the self-gettering electron field emitters while fabricating microelectronic field emission devices is also disclosed.
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Advanced Vision Technologies Inc.
Patel Nimeshkumar D.
Smith Michael J.
Touw Theodore R.
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