Fabrication process for a self-aligned optical subassembly

Details Fabrication process for a self-aligned optical subassembly Fabrication process for a self-aligned optical subassembly

1993-06-02

1996-08-27

Kunemund, Robert

Fishing, trapping, and vermin destroying

H01L 21302

Patent

active

055500889

ABSTRACT:
A method is disclosed for forming a self-aligned optical subassembly for supporting an optical fiber and associated optical component(s). In particular, sequential masking layer/silicon substrate etch operations are performed so as to etch, in series, the largest opening first and the narrowest opening last. By following this procedure, axial alignment between tandem grooves is maintained.

REFERENCES:
patent: 4765865 (1988-08-01), Gealer et al.
patent: 4810557 (1989-03-01), Blonder
patent: 4957592 (1990-09-01), O'Neill
patent: 5123073 (1992-06-01), Pimpinella
patent: 5131978 (1992-07-01), O'Neill
patent: 5257332 (1993-10-01), Pimpinella

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