Electric lamp or space discharge component or device manufacturi – Process – With assembly or disassembly
Patent
1995-05-08
1997-05-20
Ramsey, Kenneth J.
Electric lamp or space discharge component or device manufacturi
Process
With assembly or disassembly
445 50, H01J 902
Patent
active
056307411
ABSTRACT:
A lateral-emitter field emission device has a thin-film emitter cathode 50 which has thickness of not more than several hundred angstroms and has an edge or tip 110 having a small radius of curvature. To form a novel display cell structure, a cathodoluminescent phosphor anode 60 is positioned below the plane of the thin-film lateral-emitter cathode 50, allowing a large portion of the phosphor anode's top surface to emit light in the desired direction. An anode contact layer contacts the phosphor anode 60 from below to form a buried anode contact 90 which does not interfere with light emission. The anode phosphor is precisely spaced apart from the cathode edge or tip and receives electrons emitted by field emission from the edge or tip of the lateral-emitter cathode, when a small bias voltage is applied. The device may be configured as a diode, triode, or tetrode, etc. having one or more control electrodes 140 and/or 170 positioned to allow control of current from the emitter to the phosphor anode by an electrical signal applied to the control electrode. In a particularly simple embodiment, a single control electrode 140 is positioned in a plane below the emitter edge or tip 110 and automatically aligned to that edge. The display cell structure may be repeated many times in an array, and the display cell structure of the invention lends itself to novel array structures which are also disclosed. A fabrication process is disclosed using subprocess steps S1-S19 similar to those of semiconductor integrated circuit fabrication to produce the novel display cell structures and their arrays. Various embodiments of the fabrication process allow the use of conductive or insulating substrates 20 and allow fabrication of devices having various functions and complexity.
REFERENCES:
patent: 4702792 (1987-10-01), Chow et al.
patent: 4728851 (1988-03-01), Lambe
patent: 4789648 (1988-12-01), Chow et al.
patent: 4827177 (1989-05-01), Lee et al.
patent: 4857161 (1989-08-01), Borel et al.
patent: 4908539 (1990-03-01), Meyer
patent: 4923421 (1990-05-01), Brodie et al.
patent: 4940916 (1990-07-01), Borel et al.
patent: 4944836 (1990-07-01), Beyer et al.
patent: 4964946 (1990-10-01), Gray et al.
patent: 4999539 (1991-03-01), Coovert et al.
patent: 5063327 (1991-11-01), Brodie et al.
patent: 5064396 (1991-11-01), Spindt
patent: 5075591 (1991-12-01), Holmberg
patent: 5140219 (1992-08-01), Kane
patent: 5150192 (1992-09-01), Greene et al.
patent: 5191217 (1993-03-01), Kane et al.
patent: 5209687 (1993-05-01), Konishi
patent: 5210462 (1993-05-01), Konishi
patent: 5210472 (1993-05-01), Casper et al.
patent: 5214347 (1993-05-01), Gray
patent: 5216324 (1993-06-01), Curtin
patent: 5231606 (1993-07-01), Gray
patent: 5232549 (1993-08-01), Cathey et al.
patent: 5233263 (1993-08-01), Cronin et al.
patent: 5266155 (1993-11-01), Gray
patent: 5277638 (1994-01-01), Lee
patent: 5281890 (1994-01-01), Kane
patent: 5289086 (1994-02-01), Kane
patent: 5308439 (1994-05-01), Cronin et al.
patent: 5329207 (1994-07-01), Cathey et al.
patent: 5342477 (1994-08-01), Cathey
patent: 5347292 (1994-09-01), Ge et al.
patent: 5374868 (1994-12-01), Tjaden et al.
patent: 5382185 (1995-01-01), Gray et al.
patent: 5386172 (1995-01-01), Komatsu
K. R. Shoulders "Microelectronics Using Electron-Beam-Activated Machining Techniques" in F. L. Alt (Ed.) Advances in Computers vol. 2, N.Y., Academic Press, 1961 pp. 135-197.
C. A. Spindt "A Thin-Film Field-Emission Cathode" J. Applied Physics vol. 39, No. 7 (1968) pp. 3504-3505.
R. F. Greene et al. "Vacuum Microelectronics" Proc. IEDM 1989, (1.3.1-1.3.5), pp. 15-19.
R. A. Lee et al., "Semiconductor Fabrication Technology Applied to Micrometer Valves" IEEE Transactions on Electron Devices, vol. 36, No. 11 (Nov. 1989) pp. 2703-2708.
H. H. Busta et al. "Lateral Miniaturized Vacuum Devices" Proc. IEDM 1989, (20.4.1-20.4.4), pp. 533-536.
J. E. Cronin et al. "Matrix Display Using Electron-Emission Devices" IBM Technical Disclosure Bulletin, vol. 32, No. 5B (Oct. 1989) pp. 239-240.
J. E. Cronin et al. "Field Emission Triode Integrated-Circuit Construction Method" IBM Technical Disclosure Bulletin, vol. 32, No. 5B (Oct. 1989) pp. 242-243.
Anonymous "Ionizable Gas Device Compatible with Integrated Circuit Device Size and Processing" reproduced from Research Disclosure No. 305 (Sep. 1989).
W. N. Carr et al. "Vacuum Microtriode Characteristics" J. Vac. Sci. Technol. vol. A8, No. 4 (Jul./Aug. 1990), pp. 3581-3585.
B. Goodman "Return of the Vacuum Tube" Discover, vol. 11, No. 3 (Mar. 1990) pp. 55-58.
S. Kanemaru et al. "Fabrication and Characterization of Lateral Field-Emitter Triodes" IEEE Transactions on electron Devices, vol. 38, No. 10 (Oct. 1991) pp. 2334-2336.
A. Kaneko et al. "Wedge-Shaped Field Emitter Arrays for Flat Display" IEEE Transactions on Electron Devices, vol. 38, No. 10 (Oct. 1991) pp. 2395-2397.
H. H. Busta, "Vacuum Microelectronics--1992" Journal of Micromechanics and Microengineering, vol. 2, No. 2 (Jun. 1992), pp. 43-74.
K. Derbyshire "Beyond AMLCDs: Field emission displays?" Solid State Technology, vol. 37, No. 11 (Nov. 1994) pp. 55-65.
Advanced Vision Technologies Inc.
Ramsey Kenneth J.
Touw Theodore R.
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