Fabrication of transducer structures

Details Fabrication of transducer structures Fabrication of transducer structures

2011-08-09

2011-08-09

Pyo, Kevin (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

Photocell controlled circuit

C250S214100, C250S338400, C250S332000, C257S431000, C430S060000

Reexamination Certificate

active

07994463

ABSTRACT:
Methods for fabricating structures such as transducer pedestal structures and transducers fabricated by the methods.

REFERENCES:
patent: 7655495 (2010-02-01), Adkisson et al.
patent: 7679042 (2010-03-01), Flusberg et al.
patent: 2003/0132386 (2003-07-01), Carr et al.
patent: 2005/0074206 (2005-04-01), Domash et al.
patent: 2005/0082480 (2005-04-01), Wagner et al.
patent: 2007/0114622 (2007-05-01), Adkisson et al.
patent: 2009/0206377 (2009-08-01), Swain et al.
Janusz Bryzek, Kurt Petersen, and Wendell McCulley, “Micromachines on the March,” IEEE Spectrum, May 1994, pp. 20-30.

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