Fabrication of thin film resistors and capacitors

Details Fabrication of thin film resistors and capacitors Fabrication of thin film resistors and capacitors

1980-10-07

1983-05-31

Tufariello, T. M.

Chemistry: electrical and wave energy

Processes and products

204 37R, 204 38A, C25D 1102, C25D 1118

Patent

active

043859666

ABSTRACT:
Disclosed is a method for fabricating a circuit including thin film resistors (15) and capacitors (12, 13, 14, 16) on a single substrate whereby stabilization is effected after all such components are completely formed. A high pressure steam atmosphere is utilized for stabilization so that the resistors can be stabilized at lower temperatures and/or times and the capacitors are not degraded.

REFERENCES:
patent: 2766509 (1956-10-01), Le Loup
patent: 3607679 (1971-09-01), Melroy
patent: 3718565 (1973-02-01), Pelletier
patent: 4251326 (1981-02-01), Arcidiacono
Thermodynamic Properties of Steam, Keenan and Keyes, 1st Ed., John Wiley and Sons, pp. 23-33.

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