Superconductor technology: apparatus – material – process – High temperature – per se – Having tc greater than or equal to 150 k
Patent
1992-01-09
1993-04-27
Beck, Shrive
Superconductor technology: apparatus, material, process
High temperature , per se
Having tc greater than or equal to 150 k
505732, 505730, 505742, 427 62, 427596, 427314, B05D 306, B05D 512
Patent
active
052062120
ABSTRACT:
A laser beam (2) is applied to a target (1) of an oxide superconductive material, to deposit atoms and/or molecules which are scattered from the target (1) on a first portion (4) of a substrate (3) under an atmosphere containing oxygen for a start. Then, the substrate (3) is moved to deposit atoms and/or molecules scattered from the target (10) on a second portion, which is different form the first portion (4) of the substrate (3), under the atmosphere containing oxygen. At this time, the first portion (4) is subjected to oxygen annealing. These deposition steps are repeated until an oxide superconducting film of a desired thickness is obtained.
REFERENCES:
patent: 4290877 (1981-09-01), Blickensderfer
Wu et al., "Effect of deposition rate on properties of YBa.sub.2 Cu.sub.3 O.sub.7-.delta. superconducting thin films", Appl. Phys. Lett. 56(15) Apr. 1990, pp. 1481-1483.
Lynds et al, "High Tc superconducting thin films prepared by pulsed Nd: YAG laser ablation", AIP No. 165 (Anaheim, Calif.) Nov. 1987 pp. 159-165.
Roas et al, "Epitaxial growth of YBa.sub.2 Cu.sub.3 O.sub.7-x thin films by laser evaporation process," Appl. Phys. Lett. 53(16) Oct. 1988 pp. 1557-1559.
Kanai et al, "Formation of Bi-Sr-Ca-Cu-O Thin films by a laser Sputtering method", Jpn. J. Appl. Phys. 27(7) Jul. 1988 L 1293-1296.
Kwok et al, "Laser evaporation deposition of superconducting and dielectric thin films", Appl. Phys. Lett. 52(21) May 1988 pp. 1825-1827.
Hughes, "Scale-up problems in electron-beam evaporation and sputtering", J. Vac. Sci. Technol. 15(4) Jul./Aug. 1978 pp. 1572-1579.
Witanachchi et al, "Deposition of superconducting Y-Ba-Cu-O films at 400.degree. C. without post-annealing", Appl. Phys. Lett. 53(3) Jul. 1988 pp. 234-236.
C. Girault et al., "Influence of Oxygen Pressure on the Characteristics of the FrF-laser-induced Plasma Plume Created Above an YBaCuO Superconducting Target", Applied Physics Letters, vol. 54, No. 15, May 15, 1989, pp. 2033-2037.
O. Aucieilo et al., "Surface Compositional and Topographical Changes Resulting From Excimer Laser Impacting on YBa.sub.2 Cu.sub.3 O.sub.7 Single Phase Superconductor," Applied Physics Letters, vol. 52, No. 3, Jan. 18, 1988, pp. 239-241.
Beck Shrive
King Roy V.
Sumitomo Electric Industries Ltd.
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