Fabrication of submicron-wide lines with shadow depositions

Details Fabrication of submicron-wide lines with shadow depositions Fabrication of submicron-wide lines with shadow depositions

1982-02-01

1983-10-11

Lusignan, Michael R.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

427124, 427250, 4272557, 427 63, B05D 512

Patent

active

044092628

ABSTRACT:
A method of fabricating lines of submicron width, comprising the steps of:

REFERENCES:
patent: 3898353 (1975-08-01), Napoli et al.
patent: 4256816 (1981-03-01), Dunkleberger
Jelks et al., Appl. Phys. Lett. 34(1), Jan. 1, 1979, p. 28.
Jackel et al., IEEE Transactions on Magnetics, vol. 17, No. 1, Jan. 1981, 295.
Howard et al., Appl. Phys. Lett., 35(11), Dec. 1, 1979, p. 879.
Hu et al., IEEE Transactions on Electron Devices, vol. Ed. 27, No. 10, p. 2030, Oct. 1980.
Havemann, J. Vac. Sci. Technol. vol. 15, No. 2, Mar./Apr. 1978, p. 389.

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