Fabrication of solid state electronic devices using fluorescent

Details Fabrication of solid state electronic devices using fluorescent Fabrication of solid state electronic devices using fluorescent

1982-10-15

1984-06-26

Hearn, Brian E.

Metal working

Method of mechanical manufacture

Assembling or joining

374161, H01L 2166

Patent

active

044557418

ABSTRACT:
Solid state electronic devices are optically monitored during fabrication to detect hot spots which are indicative of faulty operation. The surface temperatures of such a device are measured by applying a fluorescent material to the device, and subsequently monitoring the temperature dependent fluorescence of the material, which is reflective of the temperature of the underlying device. Devices are accepted, rejected, or further processed in response to the monitored fluorescence.

REFERENCES:
Grilletto, C., "An X-Ray Fluorescence Technique for the Rapid Determination of Phosphorous in PSG Film" in Sol. State Tech., 20(2), 2-1977.

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