Fabrication of slot waveguide

Details Fabrication of slot waveguide Fabrication of slot waveguide

2006-07-06

2010-10-05

Tugbang, A. Dexter (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C385S131000, C385S132000

Reexamination Certificate

active

07805826

ABSTRACT:
A method for fabricating a nanometer slot waveguide comprises applying a spacer layer to a first waveguide structure, wherein the first waveguide structure includes a waveguide layer and a substrate layer and the waveguide layer has a refractive index greater than the substrate layer. A second waveguide structure is applied to the spacer layer, wherein the second waveguide structure includes a waveguide layer and a substrate layer, and the waveguide layer has a refractive index greater than the substrate layer. The substrate layer of the second waveguide structure is removed to create an intermediate waveguide structure and portions of the intermediate waveguide structure are removed to create a nanometer slot waveguide structure.

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