Fabrication of scanning III-V compound light emitters integrated

Details Fabrication of scanning III-V compound light emitters integrated Fabrication of scanning III-V compound light emitters integrated

1998-12-11

2000-04-25

Bowers, Charles

Semiconductor device manufacturing: process

Making device or circuit emissive of nonelectrical signal

Having diverse electrical device

438 46, 310 40MM, H01L 2100

Patent

active

060543353

ABSTRACT:
A III-V compound light emitter is integrated with Si-based actuators. The Proposed devices take advantage of the superior optical properties of III-V compounds and the superior mechanical properties of Si, as well as mature fabrication technologies of Si-Micro-Electro-Mechanical Systems (MEMS). The emitter can be a light emitting diode (LED), a vertical cavity surface emitting laser (VCSEL) or an edge emitting laser. Electro or magnetic based actuation from Si-based actuators provides linear or angular movement of the light emitter.

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