Radiant energy – Photocells; circuits and apparatus – With circuit for evaluating a web – strand – strip – or sheet
Reexamination Certificate
2005-02-01
2005-02-01
Allen, Stephone B. (Department: 2878)
Radiant energy
Photocells; circuits and apparatus
With circuit for evaluating a web, strand, strip, or sheet
C250S559280, C356S630000, C216S060000, C438S016000, C438S746000
Reexamination Certificate
active
06849859
ABSTRACT:
The figure of a substrate is very precisely measured and a figured-correcting layer is provided on the substrate. The thickness of the figure-correcting layer is locally measured and compared to the first measurement. The local measurement of the figure-correcting layer is accomplished through a variety of methods, including interferometry and fluorescence or ultrasound measurements. Adjustments in the thickness of the figure-correcting layer are made until the top of the figure-correcting layer matches a desired figure specification.
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Folta James A.
Spiller Eberhard
Allen Stephone B.
EUV Limited Liability Corporation
Thompson Alan H.
Wooldridge John P.
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