Fabrication of polycrystalline thin films by pulsed laser proces

Details Fabrication of polycrystalline thin films by pulsed laser proces Fabrication of polycrystalline thin films by pulsed laser proces

1993-11-18

1998-02-03

Thomas, Tom

Fishing, trapping, and vermin destroying

437173, 437 4, H01L 3118, H01L 3104

Patent

active

057144044

ABSTRACT:
A method for fabricating polycrystalline thin films on low-temperature (or high-temperature) substrates which uses processing temperatures that are low enough to avoid damage to the substrate, and then transiently heating select layers of the thin films with at least one pulse of a laser or other homogenized beam source. The pulse length is selected so that the layers of interest are transiently heated to a temperature which allows recrystallization and/or dopant activation while maintaining the substrate at a temperature which is sufficiently low to avoid damage to the substrate. This method is particularly applicable in the fabrication of solar cells.

REFERENCES:
patent: 4639277 (1987-01-01), Hawkins
patent: 5061655 (1991-10-01), Ipposhi et al.
patent: 5085939 (1992-02-01), Wenz et al.
patent: 5180690 (1993-01-01), Czubatyj et al.
patent: 5221365 (1993-06-01), Noguchi et al.
patent: 5225371 (1993-07-01), Sexton et al.
patent: 5242507 (1993-09-01), Iverson
patent: 5286306 (1994-02-01), Menezes
patent: 5294567 (1994-03-01), Dorfman et al.
patent: 5346850 (1994-09-01), Kaschmitter et al.
patent: 5372836 (1994-12-01), Imahashi et al.
patent: 5413958 (1995-05-01), Imahashi et al.
patent: 5427961 (1995-06-01), Takenouchi et al.
patent: 5456763 (1995-10-01), Kaschimitter et al.
I.P. Herman, Laser-Assisted Deposition of Thin Films from Gas-Phase and Surface-Adsorbed Molecules, Chem. Rev. 1989, 89, pp. 1323-1357.

Affiliated with

Also associated with

Rating

Fabrication of polycrystalline thin films by pulsed laser proces does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Fabrication of polycrystalline thin films by pulsed laser proces, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Fabrication of polycrystalline thin films by pulsed laser proces will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-661914