Fabrication of optical waveguide

Details Fabrication of optical waveguide Fabrication of optical waveguide

1989-09-05

1990-08-07

Lindsay, Robert L.

Compositions: ceramic

Ceramic compositions

Glass compositions, compositions containing glass other than...

65 311, 65 312, 65 301, 501 37, G02B 514, C03B 37027

Patent

active

049462512

ABSTRACT:
The guiding layers of optical waveguides are formed of arsenosilicate glass (ASG). By varying the arsenic content from 2 to 13 mole percent it is possible to vary the refractive index in the range 1.45 to 1.53. Pure silica or less heavily doped ASG can be used for the cladding layers. The ASG is preferably formed as the result of a heterogeneous reaction between silane and oxygen in the presence of arsine. Such a reaction can be carried out at temperatures down to 390.degree. C., allowing the ASG to be used on substrates of III-V compounds.

REFERENCES:
patent: 3957342 (1976-05-01), Newns et al.
patent: 4067641 (1978-01-01), Holton
patent: 4154503 (1979-05-01), Lettington et al.
patent: 4585299 (1986-04-01), Strain
patent: 4666247 (1987-05-01), MacChesney et al.
"Vapor Deposition and Properties of Binary Arsenosilicate Glass Films", J. Wong, J. Electrochem. Soc., 1972, 119(8), pp. 1071-1080.
"Segregation and Transport Coefficients of Impurities at the Si/SiO.sub.2 Interface", K. Sakamoto et al, Oct. 30, 86, J. Appl. Physics, 61(4), pp. 1553-1555.
"Redistribution of Acceptor and Donor Impurities During Thermal Oxidation of Silicon", Grove et al, J. Appl. Physics, vol. 35, No. 9, Sep. 1984, pp. 2695-2701.
"Redistribution of Arsenic in Silicon During High Pressure Thermal Oxidation", Choi et al, Dept. of Chemistry & Physics, U. N. Carolina, Jan. 1987, pp. 688-690.

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