Fabrication of nanoporous antireflection film

Details Fabrication of nanoporous antireflection film Fabrication of nanoporous antireflection film

2006-06-16

2009-10-06

Ghyka, Alexander G (Department: 2812)

Active solid-state devices (e.g., transistors, solid-state diode

With means to control surface effects

C257S642000

Reexamination Certificate

active

07598595

ABSTRACT:
A nanoporous antireflection coating preparation method. A sol-gel precursor solution containing an organic template is coated onto a substrate. The sol-gel precursor solution containing the organic template is dried into a film. The organic template within the film is then removed to form a nanoporous antireflection coating. In preferred embodiments, the organic template is removed by UV—O3treatment at ambient temperature.

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