Coating processes – Direct application of electrical – magnetic – wave – or... – Pretreatment of coating supply or source outside of primary...
Reexamination Certificate
2005-06-14
2005-06-14
Padgett, Marianne (Department: 1762)
Coating processes
Direct application of electrical, magnetic, wave, or...
Pretreatment of coating supply or source outside of primary...
C427S531000, C427S595000, C427S096400, C427S123000, C427S125000
Reexamination Certificate
active
06905736
ABSTRACT:
The method for the fabrication of nano scale temperature sensors and nano scale heaters using focused ion beam (FIB) techniques. The process used to deposit metal nano strips to form a sensor is ion beam assisted chemical vapor deposition (CVD). The FIB Ga+ion beam can be used to decompose W(CO)6molecules to deposit a tungsten nano-strip on a suitable substrate. The same substrate can also be used for Pt nano-strip deposition. The precursors for the Pt can be trimethyl platinum (CH3)3Pt in the present case. Because of the Ga+beam used in the deposition, both Pt and W nano-strips can contain a certain percentage of Ga impurities, which we denoted as Pt(Ga) and W(Ga) respectively. Our characterization of the response of this Pt(Ga)/W(Ga) nano scale junction indicates it has a temperature coefficient of approximately 5.4 mV/° C. This is a factor of approximately 130 larger than the conventional K-type thermocouples.
REFERENCES:
patent: 4526624 (1985-07-01), Tombrello et al.
patent: 4853341 (1989-08-01), Nishioka et al.
patent: 4908226 (1990-03-01), Kubena et al.
patent: 5104684 (1992-04-01), Tao et al.
patent: 5510098 (1996-04-01), Chow
patent: 5581083 (1996-12-01), Majumdar
patent: 5741557 (1998-04-01), Corbin et al.
patent: 5838005 (1998-11-01), Majumdar et al.
patent: 6630395 (2003-10-01), Kane et al.
patent: 6638580 (2003-10-01), Gavish
patent: 2002/0086526 (2002-07-01), Gavish
patent: 2000205969 (2000-07-01), None
Chow Lee
Stevie Fred
Zhou Dan
Law Offices of Brian S. Steinberger , P.A.
Padgett Marianne
Steinberger Brian S.
University of Central Florida
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