Electric lamp or space discharge component or device manufacturi – Process – Electrode making
Patent
1993-09-08
1995-10-31
Ramsey, Kenneth J.
Electric lamp or space discharge component or device manufacturi
Process
Electrode making
1566441, 445 24, H01J 902
Patent
active
054624673
ABSTRACT:
A field-emission structure suitable for large-area flat-panel televisions centers around an insulating porous layer (24A) that overlies a lower conductive region (22) situated over insulating material of a supporting substrate (20). Electron-emissive filaments (30) occupy pores (28) extending through the porous layer. A conductive gate layer (34A) through which openings (36) extend at locations centered on the filaments typically overlies the porous layer. Cavities (38) are usually provided in the porous layer along its upper surface at locations likewise centered on the filaments.
In fabricating the structure, the pores are preferably formed by etching charged-particle tracks. Electrochemical deposition is employed to selectively create the filaments in the pores. Self-alignment of the gate openings to the filaments is achieved with charged-particle track etching and/or further electrochemical processing.
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Duboc, Jr. Robert M.
Macaulay John M.
Searson Peter C.
Spindt Christopher J.
Meetin Ronald J.
Ramsey Kenneth J.
Silicon Video Corporation
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